VECTOR PROTON BEAM WRITING SYSTEM-Reference-Cited by-同舟云学术

VECTOR PROTON BEAM WRITING SYSTEM

Published:2022-08-05 Issue: Volume: Page:52-55
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Container-title:Problems of Atomic Science and Technology
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Author:

Polozhii H.E.,Ponomarev A.G.,Kolinko S.V.,Rebrov V.A.

Abstract

Vector method for scanning with focused beam of megaelectronvolt-energy in proton-beam writing is described. Vector proton-beam writing method was proven experimentally to have numerous advantages over raster method. Focused beam size and shape are measured by scanning standard copper mesh for e-beam microscopy. Prospectives of hardware and software upgrade are regarded. Vector proton-beam writing technology can be used in many applications, including X-ray optics, electronics prototyping, microrobotics, microfluidics, photonics and microstructure fabrication in new materials.

Publisher

Problems of Atomic Science and Technology

Reference8 articles.

1. V.E. Storizhko, A.G. Ponomarev, V.A. Rebrov, A.I. Chemeris, A.A. Drozdenko, A.B. Dudnik, V.I. Miroshnichenko, N.A. Sayko, P.A. Pavlenko, L.P. Peleshuk. The Sumy scanning nuclear microprobe: Design features and first tests // Nucl. Instr. and Meth. B. 2007, v. 260, p. 49-54.

2. D.V. Magilin, A.G. Ponomarev, V.A. Rebrov, N.A. Sayko, K.I. Melnik, V.I. Miroshnichenko, V.Y. Storizhko. Performance of the Sumy nuclear microprobe with the integrated probe-forming system // Nucl. Instr. and Meth. B. 2009, v. 267, p. 2046-2049.

3. V.A. Brazhnik, A.D. Dymnikov, D.N. Jamieson, S.A. Lebed, G.J.F. Legge, A.G. Ponomarev, V.E. Storizhko. Numerical optimization of magnetic nonlinear quadrupole systems in an ion microprobe with given spot size on the target // Nucl. Instr. and Meth. B. 1995, v. 104, p. 92-94.

4. S.V. Kolinko, A.G. Ponomarev, V.A. Rebrov. Precise centering and field characterization of magnetic quadrupole lenses // Nucl. Instr. and Meth. A. 2013, v. 700, p. 70-74.

5. A.D. Pogrebnyak, V.M. Beresnev, D.A. Kolesnikov, M.V. Kaverin, A.P. Shypylenko, K. Oyoshi, Y. Takeda, R. Krause-Rehberg, A.G. Ponomarev. The effect of segregation and thermodiffusion on the formation of interfaces in nanostructured (Ti-Hf-ZrV-Nb)N multielement coatings // Technical Physics Letters. 2013, v. 39, p. 280-283.

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