Author:
Ponomarev A.G.,Kolinko S.V.,Polozhii H.E.,Rebrov V.A.
Abstract
A probe-forming system based on a separate orthomorphic quadruplet of magnetic quadrupole lenses with a short working distance is considered, allowing the system demagnification to be significantly increased. Three magnetic octupole lenses are used to correct spherical aberrations. The parameters of the octupole corrector are calculated using the matricant method. The focusing properties of the system are determined by means of a probe formation optimization process based on the value of the maximum reduced collimated acceptance. The calculations performed showed the feasibility of such a probe forming system for microanalysis and proton beam writing technique.
Publisher
Problems of Atomic Science and Technology
Subject
General Medicine,General Medicine,Geriatrics and Gerontology,Insect Science,Ecology,Ecology, Evolution, Behavior and Systematics,General Medicine,Genetics,Animal Science and Zoology,General Earth and Planetary Sciences,General Environmental Science,General Earth and Planetary Sciences,General Environmental Science,General Medicine,Earth-Surface Processes