Non-scanning, non-interferometric, three-dimensional optical prof ilometer with nanometer resolution-Reference-Cited by-同舟云学术

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Non-scanning, non-interferometric, three-dimensional optical prof ilometer with nanometer resolution

Published:2011 Issue:10 Volume:9 Page:101202-101204
ISSN:1671-7694
Container-title:Chinese Optics Letters
language:en
Short-container-title:中国光学快报

Author:

Chen-Tai Tan 譚振台,Yuan-Sheng Chan 詹遠生,Jhao-An Chen 陳昭安,Teh-Chao Liao 廖得照,Ming-Hung Chiu 邱銘宏

Publisher

Shanghai Institute of Optics and Fine Mechanics

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Adaptive window iteration algorithm for enhancing 3D shape recovery from image focus;Chinese Optics Letters;2019

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4. Full-field Three-dimensional Angle-deviation Optical Microscope;Smart Science;2015-01

5. Novel technique for characterizing feature profiles in photolithography process;Chinese Optics Letters;2012

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