Forecast of structure sidewall profiles for z-cut quartz after anisotropic wet etching-Reference-Cited by-同舟云学术

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Forecast of structure sidewall profiles for z-cut quartz after anisotropic wet etching

Published:2012 Issue:2 Volume:20 Page:352-359
ISSN:1004-924X
Container-title:Optics and Precision Engineering
language:en
Short-container-title:光学精密工程

Author:

XIE Li-qiang 谢立强,XING Jian-chun 邢建春,WANG Hao-xu 王浩旭,DONG Pei-tao 董培涛,WU Xue-zhong 吴学忠

Publisher

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

Subject

Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Dynamic process of wet etching using BOE solutions to control the etch rate, roughness, and surface morphology of a Z-cut α-quartz wafer;Ceramics International;2024-07

2. Surface Roughness of Z-Cut Quartz Etched by Ammonium Bifluoride and Ammonium Bifluoride Mixed with Isopropyl Alcohol Solutions;Micromachines;2017-04-13

3. Fabrication of a novel quartz micromachined gyroscope;AIP Advances;2015-04

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