Author:
Xia Jingjing 夏菁菁,Yu Jun 余俊,Wang Zhanshan 王占山,Lu Siwen 陆斯文
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. 基于环摆式双面抛光法加工预测模型的去除均匀性研究;Acta Optica Sinica;2023
2. 基于薄膜传感器的化学机械抛光面压力分布检测装置研制及应用;Laser & Optoelectronics Progress;2023