Interferometric precision displacement measurement system based on diffraction grating-Reference-Cited by-同舟云学术

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Interferometric precision displacement measurement system based on diffraction grating

Published:2017 Issue:1 Volume:10 Page:39-50
ISSN:2095-1531
Container-title:Chinese Optics
language:en
Short-container-title:中国光学

Author:

LV Qiang 吕强,LI Wen-hao 李文昊,Bayanheshig 巴音贺希格,BAI Yang 柏杨,LIU Zhao-wu 刘兆武,WANG Wei 王玮

Publisher

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

Subject

Atomic and Molecular Physics, and Optics

Cited by 23 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design of grating encoder displacement measurement system;Journal of Physics: Conference Series;2024-08-01

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4. Out-of-plane displacement sensor based on the Talbot effect in angular-modulated double-layer optical gratings;Applied Optics;2022-11-15

5. Synthetic model of nonlinear errors in grating displacement measurement system;Optical Engineering;2022-06-17

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