Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Space and Planetary Science,Aerospace Engineering,Atomic and Molecular Physics, and Optics
Cited by
2 articles.
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1. KrF深紫外光刻投影物镜光机热集成分析与优化;Acta Optica Sinica;2024
2. 大数值孔径宽光谱折反式物镜设计(特邀);Infrared and Laser Engineering;2023