Long Trace Profiler for Measuring Groove Density of Diffraction Gratings
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Published:2021
Issue:6
Volume:41
Page:0612002
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ISSN:0253-2239
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Container-title:Acta Optica Sinica
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language:en
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Short-container-title:光学学报
Author:
Wu Xinpu 吴新朴,Wei Huaikun 韦怀坤,Liu Zhengkun 刘正坤,Qiu Keqiang 邱克强,Xu Xiangdong 徐向东,Hong Yilin 洪义麟
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
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