EFFECTS OF THERMAL EXPANSION COEFFICIENT MISMATCH ON STRUCTURE AND ELECTRICAL PROPERTIES OF TiO2 FILM DEPOSITED ON Si SUBSTRATE

Abstract

Effects of thermal expansion coefficient (CTE) mismatch on structure and electrical properties of TiO 2 film deposited on Si substrate by ion beam assistant electron beam evaporation have been investigated. Because of a high CTE mismatch between TiO 2 film and Si substrate, microcracks appeared in the TiO 2 film deposited directly on Si substrate after the as-deposited film was annealed at 600°C. In order to decrease the CTE mismatch, TiO 2 film was deposited on Si substrate which was covered by a ZrO 2 thin layer. As a result, crack–free TiO 2 film after annealed at the same temperature was obtained. Meanwhile, corresponding to the crack–free structure, the TiO 2 thin film has more stable dielectric properties and excellent I–V characteristics.