Discriminative Feature Selection Based on Imbalance SVDD for Fault Detection of Semiconductor Manufacturing Processes

Abstract

Feature selection has become a key step of fault detection. Unfortunately, the class imbalance in the modern semiconductor industry makes feature selection quite challenging. This paper analyzes the challenges and indicates the limitations of the traditional supervised and unsupervised feature selection methods. To cope with the limitations, a new feature selection method named imbalanced support vector data description-radius-recursive feature selection (ISVDD-radius-RFE) is proposed. When selecting features, the ISVDD-radius-RFE has three advantages: (1) ISVDD-radius-RFE is designed to find the most representative feature by finding the real shape of normal samples. (2) ISVDD-radius-RFE can represent the real shape of normal samples more correctly by introducing the discriminant information from fault samples. (3) ISVDD-radius-RFE is optimized for fault detection where the imbalance data is common. The kernel ISVDD-radius-RFE is also described in this paper. The proposed method is demonstrated through its application in the banana set and SECOM dataset. The experimental results confirm ISVDD-radius-RFE and kernel ISVDD-radius-RFE improve the performance of fault detection.