Affiliation:
1. University of Tuebingen, Institute of Organic Chemistry, Tuebingen, West Germany
Abstract
Thin films of BaO , Y 2 O 3, Eu 2 O 3, Er 2 O 3 and CuO have been prepared by plasma-enhanced CVD using the heptanedionato- and pentanedionato-complexes of the metals as precursors.
Publisher
World Scientific Pub Co Pte Lt
Subject
Condensed Matter Physics,Statistical and Nonlinear Physics
Cited by
15 articles.
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