MECHANICAL BEHAVIOR OF A BI-LAYER CANTILEVER MICRO-BEAM SUBJECTED TO ELECTROSTATIC FORCE, MECHANICAL SHOCK AND THERMAL MOMENT

Abstract

In the present work, we study the static and dynamic behavior of a bi-layer cantilever micro-beam and its pull-in instability subjected to simultaneous effects of thermal moment, electrostatic force and mechanical shock. The nonlinear governing equation in the static case has been linearized using a Step-by-Step Linearization Method (SSLM) and the resulted linear equation has been solved using a Finite Difference Method (FDM). The obtained results for some cases have been compared to the existing results and good agreement achieved. The dynamic response of the system owing to application of a mechanical shock and a step DC voltage for thermally actuated micro-beam have been accomplished by a partial differential equation. A Reduced-Order Model (ROM) has been used to simulate the dynamic behavior of the micro-beam. The effects of temperature changes and mechanical shock on the pull-in behavior have been studied and obtained results show an earlier pull-in phenomenon experience when these effects are considered.