Dielectric Elastomer as a New Material for Electrostatically Actuated Microbeams: Stability Analysis

Abstract

Due to the interesting properties such as light weight and high deformation ability, dielectric elastomer (DE) resonators can be good alternatives for conventional silicon resonant beams used in micro-electro-mechanical systems (MEMS). This paper proposes a modeling in which a pre-stretched clamped-clamped DE-based microbeam oscillating above the ground substrate is subjected to an external electrostatic pressure. Using a DE-based beam affects the total rigidity of the system, which may lead to an anticipated saddle-node or pitchfork bifurcation. Hence, the present study tries to analyze the effects of DE properties on changing the stability regime of DE-based microbeams under electrostatic actuation. The stability of the system has been investigated using an eigen-value form of the problem. The effects of DE properties including pre-stress, relative permittivity and voltage value across the electrodes on pull-in or divergence instability as well as the frequency response of the system have been investigated. Moreover, the critical values of the DE voltage as a booster of instability occurrence have been obtained in either the presence or absence of the direct current (DC) voltage. It has been found that the pre-stress and appropriate DE permittivity can provide a needed magnitude of the DE actuating voltage to alter the resonance frequency and stability positions of the structure.