Material dielectricity effects on the performance of capacitive micro-devices: a nonlinear study
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
https://link.springer.com/content/pdf/10.1007/s10999-023-09649-6.pdf
Reference44 articles.
1. Abbasnejad, B., Rezazadeh, G.: Mechanical behavior of a FGM micro-beam subjected to a nonlinear electrostatic pressure. Int. J. Mech. Mater. Des. 8(4), 381–392 (2012). https://doi.org/10.1007/s10999-012-9202-x
2. Afrang, S., Abbaspour-Sani, E.: A low voltage MEMS structure for RF capacitive switches. Prog. Electromagn. Res. 65, 157–167 (2006)
3. Angira, M.: High performance capacitive RF-MEMS switch based on HfO2 dielectric. Trans. Electr. Electron. Mater. 20(1), 52–59 (2019)
4. Attaran, A., Rashidzadeh, R.: ‘Ultra low actuation voltage RF MEMS switch. Micro Nano Syst. Lett. 3(1), 1–4 (2015)
5. Aziz, S.: Applications of MEMS Sensors in Automotive Industry. EasyChair (2020)
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Exploring gradual material rigidity degradation effects on the nonlinear coupled axial-transversal nonlinear response of a capacitive micro-beam;European Journal of Mechanics - A/Solids;2024-07
2. Mathematical modeling of an electrostatic MEMS with tilted elastomeric micro-pillars;Applied Mathematical Modelling;2024-07
3. Effects of the Temperature-Dependent Behavior of the Gap-Filling PDMS on the Response of a Capacitive MEMS to the Electrostatic Actuation;International Journal of Applied Mechanics;2024-03-07
4. Investigation of the Transient Responses of a Beam on an Elastic Polymeric Foundation;Bulletin of the South Ural State University. Series "Mathematical Modelling, Programming and Computer Software";2024
5. Design of two layer clamped-clamped microsensor based on classical and non-classical theories;2023-11-09
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3