Design and development of MEMS quartz gyroscope measurement and control circuit with automatic gain control principle

Abstract

Angular velocity is a very important measurement parameter for autonomous driving and industrial applications. The design of MEMS quartz gyro measurement and control circuit has always been the key to restricting the measurement angular velocity performance of gyro system. This paper introduces the application-specific integrated circuit (ASIC) design and implementation of a MEMS quartz gyro measurement and control circuit for angular velocity measurement. The designed nonlinear multiplier can use a square wave to drive the gyro’s sensitive structure at the beginning of gyro start-up, thereby reducing the gyro power-up time. The drive circuit replaces the PLL with an automatic gain control unit composed of peak detection and proportional integration (PI) controller, which makes the MEMS gyro system have good robustness. First, SIMULINK is used to model and simulate the MEMS gyroscope system-level model, which illustrates the feasibility of the drive circuit design scheme. Then, the operating principle of the drive loop is analyzed, and the design of the key circuit modules of the measurement and control circuit is introduced. Finally, the performance of the gyroscope drive and detection circuit is experimentally tested, the amplitude and frequency uncertainty of the gyroscope drive circuit are evaluated, and the bias instability and nonlinearity of the gyroscope are tested, the experiment results show that the gyroscope has good performance.