Optimization effect of annealing treatment on oxygen-implanted Nd:CNGG waveguides

Abstract

Neodymium-doped calcium niobium gallium garnet (Nd:CNGG) waveguide operated at 632.8 nm is demonstrated by the 3.0-MeV oxygen-ion implantation with a fluence of [Formula: see text] ions/cm2. The annealing treatment at 300[Formula: see text]C for 45 min is carried out to optimize the waveguide quality. The dark-mode spectra are measured by the [Formula: see text]-line technique. The refractive index profiles are calculated from the effective refractive indices of the waveguide modes. The near-field intensity distributions are simulated based on the reconstructed refractive index profiles. The annealing treatment process could effectively remove unwanted defects and optimize the waveguide quality. The optical properties of the annealed waveguide are better than that of the as-implanted waveguide.