Characterization of optical waveguides in Ce3+-doped phosphate glasses formed by He+ion implantation

Abstract

Abstract In this work, the Ce3+-doped phosphate glass is carried out to fabricate the planar waveguides by the 400 keV He+ ion implantation with a dose of 6.0 × 1016 ions cm−2. The dark-mode spectrum of the waveguide at a wavelength of 632.8 nm is obtained by the prism coupling technique. The SRIM 2013 software is used to analyze the energy deposition induced by the ion implantation and the RCM is employed to reconstruct the refractive index profile of the planar waveguide. The end-face coupling technique is applied to the measurement of the propagation mode image of the waveguide at 632.8 nm. The Ce3+-doped phosphate glass waveguide has the potential for an integrated optical device.