1. School of Microelectronics, South China University of Technology, Guangzhou, Guangdong, China
2. Science and Technology on Reliability Physics and, Application of Electronic Component Laboratory, Guangzhou, Guangdong, China
3. Guangdong University of Technology, Guangzhou, Guangdong, China
4. Guangdong Institute of Semiconductor Industrial Technology, Guangzhou, Guangdong, China