The simulation, fabrication technology and characteristic research of micro-pressure sensor with isosceles trapezoidal beam-membrane

Abstract

A micro-pressure sensor with an isosceles trapezoidal beam-membrane (ITBM) is proposed in this paper, consisting of a square silicon membrane, four isosceles trapezoidal beams (ITBs) and four piezoresistors. To investigate how the elastic silicon membrane affects pressure sensitive characteristics, simulation models based on ANSYS 15.0 software were used to analyze the effect of structural dimension on the characteristics of pressure sensor. According to that, the chips of micro-pressure sensors were fabricated by micro-electro-mechanical system (MEMS) technology on a silicon wafer with [Formula: see text] orientation. The experimental results show that the proposed sensor achieves a better sensitivity of 9.64 mV/kPa and an excellent linearity of 0.09%F.S. in the range of 0–3.0 kPa at room temperature and a supply voltage of 5.0 V, with a super temperature coefficient of sensitivity (TCS) about - 2180 ppm/[Formula: see text] from −40[Formula: see text] to 85[Formula: see text] and low pressure measurement less than 3.0 kPa.