ON NONLINEAR RESPONSE NEAR-HALF NATURAL FREQUENCY OF ELECTROSTATICALLY ACTUATED MICRORESONATORS-Reference-Cited by-同舟云学术

ON NONLINEAR RESPONSE NEAR-HALF NATURAL FREQUENCY OF ELECTROSTATICALLY ACTUATED MICRORESONATORS

Published:2011-08 Issue:04 Volume:11 Page:641-672
ISSN:0219-4554
Container-title:International Journal of Structural Stability and Dynamics
language:en
Short-container-title:Int. J. Str. Stab. Dyn.

Author:

CARUNTU DUMITRU I.¹,KNECHT MARTIN²

Affiliation:

1. Mechanical Engineering Department, University of Texas-Pan American, Edinburg, Texas 78541, U.S.A.

2. South Texas College, Engineering Department, McAllen, TX 78501, U.S.A.

Abstract

This paper deals with the nonlinear response of electrostatically actuated cantilever beam microresonators near-half natural frequency. A first-order fringe correction of the electrostatic force, viscous damping, and Casimir effect are included in the model. Both forces, electrostatic and Casimir, are nonlinear. The dynamics of the resonator is investigated using the method of multiple scales (MMS) in a direct approach of the problem. The reduced order model (ROM) method, based on Galerkin procedure, is used as well. Steady-state motions are found. Numerical simulations are conducted for uniform microresonators. The influences of damping, actuation, and fringe effect on the resonator response are found.

Publisher

World Scientific Pub Co Pte Lt

Subject

Applied Mathematics,Mechanical Engineering,Ocean Engineering,Aerospace Engineering,Building and Construction,Civil and Structural Engineering

Link

https://www.worldscientific.com/doi/pdf/10.1142/S0219455411004282

Reference36 articles.

1. Closed-form solutions of the pull-in instability in nano-cantilevers under electrostatic and intermolecular surface forces

2. Analytical investigation and numerical verification of Casimir effect on electrostatic nano-cantilevers

3. Generalized parametric resonance in electrostatically actuated microelectromechanical oscillators

4. Application of parametric resonance amplification in a single-crystal silicon micro-oscillator based mass sensor

5. Effect of cubic nonlinearity on auto-parametrically amplified resonant MEMS mass sensor

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