Publisher
Springer Nature Switzerland
Reference17 articles.
1. S. Azizi, A. Ghodsi, H. Jafari, M.R. Ghazavi, A conceptual study on the dynamics of a piezoelectric MEMS energy harvester. Energy 96, 495–506 (2016)
2. M.H. Hasan, F.M. Alsaleem, H.M. Ouakad, Novel threshold pressure sensors based on nonlinear dynamics of MEMS resonators. J. Micromech. Microeng. 28(6), 65007–65019 (2018)
3. I.E. Lysenko, A.V. Tkachenko, O.A. Ezhova, S.I. Shafrostova, Design and simulation of RF MEMS switch for use in the millimetre wavelength range and SPDT RF MEMS switch. J. Phys. 1695(1), 12162–12170 (2020)
4. Z. Shi, L. Fang, L. Zhong, MEMS-based filter integrating tunable Fabry–Perot cavity and grating. Optics Commun. 402, 472–477 (2017)
5. Z. Pentek, T. Hiller, A. Czmerk, Algorithmic enhancement of automotive MEMS gyroscopes with consumer-type redundancy. IEEE Sens. J. 21(2), 2092–2103 (2021)