1. Department of Mechanical Engineering, National Central University, Jhongli City 32001, Taiwan
2. Department of Microelectronics Engineering, National Kaohsiung University of Science and Technology, Kaohsiung City 88157, Taiwan
3. Department of Electrical Engineering, Institute of Microelectronics, National Cheng Kung University, No. 1, Ta Hseuh Road, Tainan City 70101, Taiwan
4. Department of Photonics, College of Electrical and Computer Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan
5. Semiconductor Research Center, Hon Hai Research Institute, Taipei 11492, Taiwan