Ultra clean manufacturing techniques for final optics assembly in high-power laser facility

Author:

Yuan Xiaodong1,Yao Caizhen1,Miao Xinxiang1,Lv Haibing1,Zhou Guorui1,Niu Longfei1,Liu Hao1,Zhang Feihu2,Bai Qingshun2,Chen Jiaxuan2,Cao Yongzhi2,Guo Yongbo2

Affiliation:

1. Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, P. R. China

2. Harbin Institute of Technology, Harbin 150001, P. R. China

Abstract

Cleanliness control is one of the most important processes for final optics assembly (FOA) in high-power laser systems. In this paper, an “Ultra Clean Manufacturing (UCM)” concept is put forward for the first time to satisfy the cleanliness requirements for FOA. First, the challenges and requirements for cleanliness in FOA are introduced and the concept of UCM is proposed. Significant surface cleaning technologies for mechanical parts and optics are then expounded. Finally, surface cleanliness control techniques, such as “gas knife” and “laser cleaning”, are developed as online cleaning methods for the surface cleanliness in FOA.

Funder

National Natural Science Foundation of China

Special foundation for Young Scientists of LFRC

Special foundation for Young Scientists of CAEP

Publisher

World Scientific Pub Co Pte Lt

Subject

Condensed Matter Physics,Statistical and Nonlinear Physics

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