Near-Net Ceramic Micro-Tubes Fabricated by Electrophoretic Deposition Process

Abstract

The forming or shaping of ceramic micro-tubes is usually difficult with conventional ceramic processing. In some cases, parts that are not possible to produce by any other techniques can be fabricated with electrophoretic deposition process (EPD). In this paper, EPD is shown to be an operationally simple, rapid, and reliable technique for forming a wide range of ceramic micro-tubes required in electronic devices such as actuators, motors, optical modulators and MEMS. These topics will be discussed in detail.