An ultrasonic micromotor using a bending cylindrical transducer based on PZT thin film-Reference-Cited by-同舟云学术

An ultrasonic micromotor using a bending cylindrical transducer based on PZT thin film

Published:1995-08 Issue:1-2 Volume:50 Page:75-80
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Morita Takeshi,Kurosawa Minoru,Higuchi Toshiro

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. IC-processed electrostatic micromotors;Fan;Sensors and Actuators,1989

2. Harmonic electrostatic motors;Trimmer;Sensors and Actuators,1989

3. Piezoelectric micromotors for microrobots;Flynn;Proc. 1990 IEEE Ultrasonics Symp.,1990

4. Hybrid ultrasonic micromachined motors;Racine;Proc. 1993 IEEE MEMS,1993

5. An ultrasonic motor using bending vibration of a short cylinder;Kurosawa;IEEE Trans. Ultrason. Ferroelectr. Freq. Control, UDDC-36,1989

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