Plasmonic metalens for nanofabrication
Author:
Affiliation:
1. State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, China
Funder
National Basic Research Program of China
Publisher
Oxford University Press (OUP)
Subject
Multidisciplinary
Link
http://academic.oup.com/nsr/article-pdf/5/2/137/31567093/nwx135.pdf
Reference10 articles.
1. Principles of electromagnetic waves in metasurfaces
2. Negative Refraction Makes a Perfect Lens
3. Surface plasmon resonant interference nanolithography technique
4. Sub-Diffraction-Limited Optical Imaging with a Silver Superlens
5. Enhancing aspect profile of half-pitch 32 nm and 22 nm lithography with plasmonic cavity lens
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