Review on the adsorption of airborne molecular contaminants in electronic industry cleanrooms

Abstract

Abstract Chemical filters based on porous media can effectively adsorb airborne molecular contaminants (AMCs) in electronic industry cleanrooms. In this article, the adsorption principle, adsorption model and performance characterization and evaluation of porous media are summarized. In addition, future research directions related to porous media are proposed: (i) development of new porous media with specific functional groups and higher specific surface area, (ii) construction of a multi-scale adsorption model depending on both macro- and micro-scales and (iii) establishment of a new method for evaluating the adsorption performance of chemical filters in an approximate real environment with low concentration and multiple target AMCs.