Attainment of 40.5 pm spatial resolution using 300 kV scanning transmission electron microscope equipped with fifth-order aberration corrector
Author:
Affiliation:
1. JEOL Ltd, 3-1-2 Musashino, Akishima, Tokyo196-8558, Japan
2. Institute of Engineering Innovation, The University of Tokyo, 2-11-16 Yayoi, Bunkyo-ku, Tokyo113-8656, Japan
Abstract
Funder
Japan Society for the Promotion of Science
Publisher
Oxford University Press (OUP)
Subject
Radiology Nuclear Medicine and imaging,Instrumentation,Structural Biology
Link
http://academic.oup.com/jmicro/article-pdf/67/1/46/35122967/dfx122.pdf
Reference20 articles.
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2. Electron microscopy image enhanced;Haider;Nature,1998
3. Sub-angstrom resolution using aberration corrected electron optics;Batson;Nature,2002
4. Towards sub-0.5Å electron beams;Krivanek;Ultramicroscopy,2003
5. Development of Cs and Cc correctors for transmission electron microscopy;Hosokawa;Microscopy,2013
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