Design and fabrication of an electrochemical chip for liquid-phase transmission electron microscopy-Reference-Cited by-同舟云学术

Design and fabrication of an electrochemical chip for liquid-phase transmission electron microscopy

Published:2022-05-04 Issue:4 Volume:71 Page:238-241
ISSN:2050-5698
Container-title:Microscopy
language:en
Short-container-title:

Author:

Sasaki Yuki¹^ORCID,Mizushima Ayako²,Mita Yoshio²,Yoshida Kaname¹^ORCID,Kuwabara Akihide¹,Ikuhara Yuichi¹³

Affiliation:

1. Nanostructures Research Laboratory, Japan Fine Ceramics Center , 2-4-1 Mutsuno, Atsuta-ku, Nagoya 456-8587, Japan

2. Department of Electrical Engineering and Information Systems, School of Engineering, The University of Tokyo , 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan

3. Institute of Engineering Innovation, School of Engineering, The University of Tokyo , 2-11-16 Yayoi, Bunkyo-ku, Tokyo 113-8656, Japan

Abstract

Abstract Liquid-phase transmission electron microscopy (LP-TEM) can be used with an electrochemical chip (e-chip) to observe electrochemical reactions in a liquid in situ. The design of electrodes on an e-chip fabricated using microelectromechanical system technology cannot be easily changed. Here, we report a newly designed e-chip and its fabrication process. Electrodes with a desired shape were fabricated with various metals via an additional step of vacuum deposition onto our e-chip with a shadow mask. For precise control of the electrochemical reactions in LP-TEM, optimization of the electrode shape and material is critical.

Funder

Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan

New Energy and Industrial Technology Development Organization

Publisher

Oxford University Press (OUP)

Subject

Radiology, Nuclear Medicine and imaging,Instrumentation,Structural Biology

Link

https://academic.oup.com/jmicro/advance-article-pdf/doi/10.1093/jmicro/dfac023/43905304/dfac023.pdf

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