PFIB and STEM EBIC: A Potent Combination for Operando TEM of Electronic Devices
Author:
Affiliation:
1. NanoElectronic Imaging, Inc. , Los Angeles, CA , USA
2. University of California Los Angeles , Los Angeles , USA
Publisher
Oxford University Press (OUP)
Link
https://academic.oup.com/mam/article-pdf/30/Supplement_1/ozae044.785/58669475/ozae044.785.pdf
Reference5 articles.
1. STEM Imaging with Beam-Induced Hole and Secondary Electron Currents
2. Scanning transmission electron microscope mapping of electronic transport in polycrystalline BaTiO3 ceramic capacitors
3. A novel method of semiconductor device measurements
4. Operando two-terminal devices inside a transmission electron microscope
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