Thin-film SnO<sub>2</sub> and ZnO detectors of hydrogen peroxide vapors
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Published:2018-04-16
Issue:1
Volume:7
Page:281-288
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ISSN:2194-878X
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Container-title:Journal of Sensors and Sensor Systems
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language:en
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Short-container-title:J. Sens. Sens. Syst.
Author:
Aroutiounian Vladimir,Arakelyan Valeri,Aleksanyan Mikayel,Shahnazaryan Gohar,Kacer Petr,Picha Pavel,Kovarik Jiri,Pekarek Jakub,Joost Berndt
Abstract
Abstract. Thin-film hydrogen peroxide vapor sensors made from Co-doped SnO2 and
La-doped ZnO were manufactured using the high-frequency magnetron sputtering
method. Thicknesses of deposited doped metal oxide films were measured and
their morphology was investigated. The gas sensing characteristics of the
prepared sensors were measured at different concentrations of hydrogen
peroxide vapors and different operating temperatures of the sensor. It was
found that both sensors made from doped metal oxides SnO2 and ZnO
exhibit a sufficient response to 10 ppm of hydrogen peroxide vapors at the
200 and 220 ∘C operating temperature, respectively. It was
established that the dependencies of the response on hydrogen peroxide vapor
concentration have a linear character for prepared structures at the
150 ∘C operating temperature and can be used for determination of
hydrogen peroxide vapor concentration.
Publisher
Copernicus GmbH
Subject
Electrical and Electronic Engineering,Instrumentation
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