Precision grating for measuring microscope lens distortions-Reference-Cited by-同舟云学术

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Precision grating for measuring microscope lens distortions

Published:2010 Issue:2 Volume:1 Page:83-88
ISSN:2107-6839
Container-title:International Journal of Metrology and Quality Engineering
language:
Short-container-title:Int. J. Metrol. Qual. Eng.

Author:

Jiang L.

Publisher

EDP Sciences

Subject

Safety, Risk, Reliability and Quality

Link

http://www.metrology-journal.org/10.1051/ijmqe/2010017/pdf

Reference16 articles.

1. International Technology Roadmap for Semiconductors (ITRS), Executive Summary, http://www.itrs.net/Links/2009ITRS/Home2009.htm (2009)

2. ITRS 2008 update, http://www.itrs.net/Links/2008ITRS/Home2008.htm

3. Portable coordinate measuring tool

4. Technique for separately viewing multiple levels

5. Coumarin dye number 314, Sigma-Aldrich Corporation, 3050 Spruce St., Saint Louis, MO 63103-2530

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