Technique for separately viewing multiple levels
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Published:2004
Issue:6
Volume:22
Page:3405
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Jiang L.,Feldman M.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
3 articles.
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1. A prototype optical encoder system with nanometer measurement capability;Journal of Modern Optics;2010-07-20
2. Precision grating for measuring microscope lens distortions;International Journal of Metrology and Quality Engineering;2010
3. Portable coordinate measuring tool;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2005