DEPTH RESOLUTION IN ION SPUTTERING - AN ASPECT OF QUANTITATIVEMICROANALYSIS
Author:
Publisher
EDP Sciences
Subject
General Engineering
Link
http://jphyscol.journaldephysique.org/10.1051/jphyscol:1984226/pdf
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Sputtering-induced surface roughness of metallic thin films;Thin Solid Films;1990-02
2. Influence of the depth resolution on the resulting AES profiles of components in multilayer thin film structures;Surface Science;1988-01
3. Theoretical analysis of AES depth profiling in multilayers;Surface Science;1987-08
4. Dependence of interface widths on ion bombardment conditions in secondary ion mass spectrometric analysis of a nickel/chromium multilayer structure;Analytical Chemistry;1987-06-01
5. AES sputtering depth profile analysis of C/W layered synthetic microstructures;Applied Surface Science;1987-04
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