Apparatus for the controlled deposition of multilayer films
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Publisher
EDP Sciences
Link
http://jphys.journaldephysique.org/10.1051/jphys:01964002501-2025800/pdf
Reference11 articles.
1. Improved Methods for Producing Interference Filters
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Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Accurate monitoring of dielectric film thickness;Vacuum;1995-02
2. Application of a continuous monitoring technique for the deposition of multilayer dielectric films with reproducible characteristics over a wide spectral region;Journal of Applied Spectroscopy;1982-05
3. Michelson interferometer for monitoring the thickness of dielectric films;Thin Solid Films;1970-05
4. Effect of thermal treatment on the characteristics of interference Fabry-Perot filters;Thin Solid Films;1969-06
5. Fabrication of Multilayer Dielectric Films;Journal of Vacuum Science and Technology;1966-09
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