Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Physics of Thin Films;Behrndt,1966
2. Fabrication of Multilayer Dielectric Films
3. Apparatus for the controlled deposition of multilayer films
4. Trans. 8th Vacuum Symp.;Steckelmacher,1962
5. Thin Film Microelectronics;Steckelmacher,1965
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