Monte Carlo simulation of electron swarm parameters in c-C4F8
Author:
Publisher
EDP Sciences
Subject
Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Link
http://epjap.epj.org/10.1051/epjap:2007087/pdf
Reference36 articles.
1. Electron Interactions With c-C4F8
2. Cross-section set and chemistry model for the simulation of c-C4F8 plasma discharges
3. Electron Interactions With SF6
4. C. Wen, Ph.D. thesis, Eindhoven University of Technology, 1989
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4. Ar+/Ar, O2+/O2and N2+/N2Elastic Momentum Collision Cross Sections: Calculation and Validation Using the Semi-Classical Model;Plasma Science and Technology;2014-06
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