Cross-section set and chemistry model for the simulation of c-C4F8 plasma discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1448894
Reference36 articles.
1. Absolute density and reaction kinetics of fluorine atoms in high-density c-C4F8 plasmas
2. Highly Selective and Highly AnisotropicSiO2Etching in Pulse-Time Modulated Electron Cyclotron Resonance Plasma
3. Surface Kinetics of CFxRadicals and Fluorine Atoms in the Afterglow of High-Density C4F8Plasmas
4. Ion fluxes and energies in inductively coupled radio-frequency discharges containing C2F6 andc-C4F8
5. CF, CF2, and SiF densities in inductively driven discharges containing C2F6, C4F8, and CHF3
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