Contactless mapping of lifetime and diffusion length scan map of minority carriers in silicon wafers
Author:
Publisher
EDP Sciences
Subject
Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Link
http://epjap.epj.org/10.1051/epjap:2000128/pdf
Reference20 articles.
1. Non-contact mapping of heavy metal contamination for silicon IC fabrication
2. D.K. Schroder, inSemiconductor Material and Device Characterization(Wiley Interscience Publication-New-York, 1990), p. 359.
3. Investigation of the properties of plasma-enhanced chemical vapor deposited silicon nitride and its effect on silicon surface passivation
4. Accurate method for the determination of bulk minority-carrier lifetimes of mono- and multicrystalline silicon wafers
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