High density plasma enhanced chemical vapor deposition of optical thin films
Author:
Publisher
EDP Sciences
Subject
Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Link
http://epjap.epj.org/10.1051/epjap:2004013/pdf
Reference16 articles.
1. Plasma deposition of optical films and coatings: A review
2. Silicon Oxynitride Layers for Optical Waveguide Applications
3. High Density Plasma Sources: Design, Physics and Performance, edited by O. Popov (Noyes, Park Ridge, 1995)
4. Deposition of SiO2 in integrated distributed electron cyclotron resonance microwave reactor
5. Critical ion energy and ion flux in the growth of films by plasma‐enhanced chemical‐vapor deposition
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