Effect of the hydrogen dilution on the local microstructure in hydrogenated amorphous silicon films deposited by radiofrequency magnetron sputtering
Author:
Publisher
EDP Sciences
Subject
Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Link
http://epjap.epj.org/10.1051/epjap:2000131/pdf
Reference47 articles.
1. See for example,semi-conductors and semi-metals, edited by P.K. Willardson, A.C. Beer (Academic, New-York, 1984), Vol. 21.
2. Some properties of hydrogenated amorphous silicon produced by direct reaction of silicon and hydrogen atoms
3. Influence of hydrogen on vibrational and optical properties ofa-Si1−xHxalloys
4. Hydrogenation of evaporated amorphous silicon films by plasma treatment
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