Hydrogenation of evaporated amorphous silicon films by plasma treatment
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.90370
Reference6 articles.
1. Electron Spin Resonance in Amorphous Silicon, Germanium, and Silicon Carbide
2. Structural, Optical, and Electrical Properties of Amorphous Silicon Films
3. Properties of amorphous silicon films— Dependence on deposition conditions
4. Doped amorphous semiconductors
5. Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering
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