Author:
Henrique Franciele,Maeder Andreas,Talts Ülle-Linda,Finco Giovanni,Pohl David,Kaufmann Fabian,Reig Escalé Marc,Elder Delwin,Dalton Larry,Grange Rachel
Abstract
We performed the design and fabrication of polymer waveguide circuits, aiming for applications as electro-optic devices. Uniform waveguides with over one centimeter of length were fabricated by soft nanoimprint lithography. These multimode waveguides present a height of 3 µm and low surface roughness (2 nm), with a thin residual layer of 600 nm. Propagation losses at 1550 nm are estimated to be around 7 dB/cm.