Subject
General Physics and Astronomy
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Double-Edged Effect of Aqueous Hydrofluoric Acid (HF) on Silicon Interface Quality;2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2024-05-13
2. Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging;IEEE Transactions on Semiconductor Manufacturing;2022-08
3. An effective process to remove etch damage prior to selective epitaxial growth in 3D NAND flash memory;Semiconductor Science and Technology;2019-07-30
4. Growth Mechanism of CVD Silicon;Non-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes;2016