Growth Mechanism of CVD Silicon
Author:
Publisher
Springer Netherlands
Link
http://link.springer.com/content/pdf/10.1007/978-94-017-7616-5_7
Reference33 articles.
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4. Cheong WS, Yoon DY, Kim D-Y, Hwang NM (2000) Effect of substrates on morphological evolution of a film in the silicon CVD process: Approach by charged cluster model. J Cryst Growth 218(1):27–32. doi: http://dx.doi.org/10.1016/S0022-0248(00)00542-X
5. Dove D (1964) Possible influence of electric charge effects on the initial growth processes occurring during the vapor deposition of metal films onto substrates inside the electron microscope. J Appl Phys 35(9):2785–2786
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