An AES study of damage induced by inert gas ions at SiO2 surfaces : influence of ion mass and energy
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Published:1990
Issue:4
Volume:25
Page:389-394
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ISSN:0035-1687
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Container-title:Revue de Physique Appliquée
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language:
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Short-container-title:Rev. Phys. Appl. (Paris)
Author:
Khellafi M.,Lang B.
Cited by
7 articles.
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