An AES study of the influence of carbon on the chemical structure of some oxide films deposited by PECVD of organosilicon precursors
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
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1. The early stages of oxygen adsorption on silicon surfaces as seen by electron spectroscopy
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