Study on Alternative Dipole Material Wet Clean by pH Controlled Functional Water-Reference-Cited by-同舟云学术

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Study on Alternative Dipole Material Wet Clean by pH Controlled Functional Water

Published:2023-08-14 Issue: Volume:346 Page:69-73
ISSN:1662-9779
Container-title:Solid State Phenomena
language:
Short-container-title:SSP

Author:

Tanaka Yoichi¹,Gan Nobuko¹,Ogawa Yuuichi¹,Iino Hideaki¹,Chang Ren Jie²,Homkar Suvidyakumar²,Alessio Verni Giuseppe²,Givens Michael²,Lai Ju Geng³,Pacco Antoine³^ORCID,Brus Stephan³,Arimura Hiroaki³,Oniki Yusuke³,Altamirano-Sanchez Efrain³,Holsteyns Frank³,Horiguchi Naoto³

Affiliation:

1. Kurita Water Industries Ltd.

2. ASM Belgium N.V.

3. IMEC VZW

Abstract

This paper focuses on the mechanism and methodology of the dissolution of Alternative Dipole Material (ADM) and its inhibition through the use of functional waters. The study investigates the etching behavior of ADM in different solutions, examines the surface state of ADM before and after cleaning, and evaluates the impact of the functional water process on its electrical properties.

Publisher

Trans Tech Publications, Ltd.

Subject

Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics

Link

https://www.scientific.net/SSP.346.69.pdf

Reference8 articles.

1. E. Dentoni Litta et al., International Conference on Solid State Devices and Materials, pp.533-534 (2017).

2. R. Bao et al., IEEE International Electron Devices Meeting, p.28.5.1 - 28.5.4 (2018).

3. Y. Oniki et al., Surface Preparation and Cleaning Conference, 1-2 (2018).

4. Y. Oniki et al., The Electrochemical Society Transactions, 92, No.2, pp.3-12.

5. Y. Oniki et al., Solid State Phenom 314, 119 (2021) .

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