Superminiature Eddy Current Probe for Measuring the Electrical Conductivity of Copper Thin Films

Author:

Ishkov Alexey V.1,Kunitsyn Roman A.1,Malikov Vladimir N.2

Affiliation:

1. Altai State Agricultural University

2. Altai State University

Abstract

The article considers the possibility of applying the eddy current method of non-destructive testing for measuring the electrical conductivity of new material - thin metal films. Copper films of various thickness obtained by physical vapour deposition were used as the measurement object. The deposition method and the hardware and software complex for measuring the electrical conductivity of the film were briefly described. A calibration curve that makes it possible to restore the values of the electrical conductivity of the material by the signal value of the eddy current probe was presented. The test results of films with different characteristics were given, and the distribution of the electrical conductivity of the films depending on the batch was shown. Based on different values of the electrical conductivity in a batch, the difference in deposition quality of various films was found.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

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