Development of 3C-SiC SOI Structures using Si on Polycrystalline SiC Wafer Bonded Substrates-Reference-Cited by-同舟云学术

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Development of 3C-SiC SOI Structures using Si on Polycrystalline SiC Wafer Bonded Substrates

Published:2004-06 Issue: Volume:457-460 Page:1511-1514
ISSN:1662-9752
Container-title:Materials Science Forum
language:
Short-container-title:MSF

Author:

Myers-Ward Rachael L.¹,Saddow Stephen E.²,Rao Shailaja P.³,Hobart Karl D.¹,Fatemi M.,Kub Francis J.¹

Affiliation:

1. U.S. Naval Research Laboratory

2. University of South Florida

3. Caracal, Inc.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

https://www.scientific.net/MSF.457-460.1511.pdf

Reference5 articles.

1. C.H. Carter et al: Materials Science Forum 353-356 3-6, Trans Tech Pub., Switzerland (2001).

2. J.P. Bergman, et al: Materials Science Forum 353-356 299-302, Trans Tech Pub., Switzerland (2001).

3. S. E. Saddow, et al: Mat. Res. Soc. Symp. Proc. Vol. 535 (1999), p.107.

4. K.D. Hobart, F.J. Kub, et al: J. Electrochem Society Vol. 146 (10) (1999), p.3833.

5. S. E. Saddow, G. Carter, et. Al: Materials Science Forum 338-342 245-248, Trans Tech Pub., Switzerland (2000).

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1. Analysis of single-mode optical rib waveguide in silicon carbide;Microwave and Optical Technology Letters;2013-08-26

2. Bow Free 4'' Diameter 3C-SiC Epilayers Formed upon Wafer-Bonded Si/SiC Substrates;ECS Solid State Letters;2012-09-25

3. Epitaxial Growth, Mechanical, Electrical Properties of SiC/Si and SiC/Poli-Si;Materials Science Forum;2012-05

4. SiC Films and Coatings;Silicon Carbide Biotechnology;2012

5. Demonstration of 3C-SiC MEMS Structures on Polysilicon-on-oxide Substrates;MRS Proceedings;2010

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